我们在光学级石英的生长和批量生产方面有丰富的经验。我们拥有先进的晶圆生长,晶圆研磨,抛光和检验设备。
Material | Quartz Crystal | |
Cutting Angle | X/Y/Z-cut etc | |
Diameter/size | 1”(25.4mm)-6”(150mm) | |
Tol(±) | <0.20 mm | |
Thickness | 0.05mm or more | |
LTV (5mmx5mm) | <1µm | |
TTV | <3µm | |
Bow | -30<bow<30 | |
Warp | <40µm | |
Surface Type | Single Side Polished /Double Sides Polished | |
Polished side Ra | <0.5nm | |
Back Side Criteria | General is 0.2-0.5µm or as customized | |
Scratch/Dig | Bette than 40/20 | |
Edge Criteria | R=0.2mm or Bullnose | |
Material Property | ECD | Better than grade 4 |
Inclusion | Better than grade I | |
Q-Value | Better than grade C | |
Wafer Surface Criteria | Particles ¢>0.3 µm | <= 30 |
Scratch , Chipping | None | |
Defect | No edge cracks, scratches, saw marks, stains | |
Packaging | Qty/Wafer box | 25pcs per box |