根据应用和材料要求,CQT使用各种玻璃和石英。我们的设计师和工程师擅长使用任何数量的玻璃和石英材料来加工和制造精密光学产品,如用于光学的熔融石英部件,用于光纤应用的熔融二氧化硅部件
CQT uses a variety of glass and quartz depending on the application and material requirements. Our designers and engineers are skilled at working with any number of glass and quartz materials to machine and fabricate precision optical products such as fused quartz parts for optics, fused silica parts used in fiber optic applications, and borosilicate glass parts found in semi-conductor manufacturing.
石英棒的生产工艺有哪些技术?
这是高品质的石英材料中国工厂谈论石英棒的生产过程。
1.熔融石英晶片表面因工作后的加工应力而损坏的层。
2使用喷砂方法感受晶圆上的缺陷和缺陷的下半部分。
The general specs are as follows sheet, if your specified is not included with it, you may freely tell us and we’ll pleased to customize them for you.
spec | unit | 4" | 6" | 8" | 10" | 12” |
Diameter/size(or square) | mm | 100 | 150 | 200 | 250 | 300 |
Tolerance (±) | mm | 0.2 | 0.2 | 0.2 | 0.2 | 0.2 |
Thickness | mm | 0.10 or more | 0.30 or more | 0.40 or more | 0.50 or more | 0.50 or more |
Primary reference flat | mm | 32.5 | 57.5 | Semi-notch | Semi-notch | Semi-notch |
LTV (5mmx5mm) | µm | < 0.5 | < 0.5 | < 0.5 | < 0.5 | < 0.5 |
TTV | µm | < 2 | < 3 | <3 | <5 | <5 |
Bow | µm | ±20 | ±30 | ±40 | ±40 | ±40 |
Warp | µm | ≤ 30 | ≤ 40 | ≤ 50 | ≤ 50 | ≤ 50 |
PLTV(5mm*5mm)<0.4um | % | ≥95% | ≥95% | ≥95% | ≥95% | ≥95% |
Edge Rounding | mm | Compliant with SEMI M1.2 Standard/refer to IEC62276 | ||||
Surface Type | Single Side Polished /Double Sides Polished | |||||
Polished side Ra | nm | ≤1 | ||||
Back Side Criteria | µm | general 0.2-0.7 or customized |
Material included: : Borofloat33/B270/D263/BK7 etc.
: Eagle XG , Fused Silica 7980/7978/7979 etc.
: Fused Silica JGS1/JGS2 & Single quartz etc.
: H-K9L glass/ Soda Lime etc.
Process capability:
Item | Capability |
Diameter | 5mm - 400mm |
Thickness | 50μm or more |
Dimensional Tolerance | +/- 25μm |
Thickness Tolerance | +/- 5μm |
Thickness Variation(TTV) | < 2μm |
Flatness | 1/10 Wave/Inch |
Surface Roughness (RMS) | <5Ǻ |
Scratch and Dig | 10/5 |
Particle Size | <10μm |
Bow/Warp | <10μm |